Pressure sensing device having contacts opposite a membrane
US8866241B2 · kind B2 · utility
3Cited by
1References
23Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 12, 2012 |
| Grant date | Oct 21, 2014 |
| Priority date | — |
| Expiry date | Nov 12, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/0264
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Pressure sensors that may be used in harsh or corrosive environments. One example may provide a pressure sensor having membrane with a top surface that may be free of components or electrical connections. Instead, components and electrical connections may be located under the membrane. By providing a top surface free of components and electrical connections, the top surface of the pressure sensor may be placed in harsh or corrosive environments, while components and electrical connections under the membrane may remain protected.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.