MEMS particle sorting actuator and method of manufacturing
US8871500B2 · kind B2 · utility
20Cited by
7References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2012 |
| Grant date | Oct 28, 2014 |
| Priority date | — |
| Expiry date | Jan 3, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01L2400/0633
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS-based system and a method are described for separating a target particle from the remainder of a fluid stream. The system makes use of a unique, microfabricated movable structure formed on a substrate, which moves in a rotary fashion about one or more fixed points, which are all located on one side of the axis of motion. The movable structure is actuated by a separate force-generating apparatus, which is entirely separate from the movable structure formed on its substrate. This allows the movable structure to be entirely submerged in the sample fluid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.