Patent · US Active

Biological and chemical sensors

US8871549B2 · kind B2 · utility

26Cited by
10References
26Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 14, 2013
Grant dateOct 28, 2014
Priority date
Expiry dateFeb 14, 2033

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D30/021
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Device structures, fabrication methods, and design structures for a biological and chemical sensor used to detect a property of a substance. The device structure includes a drain and a source of a field effect transistor formed at a frontside of a substrate. A sensing layer is formed at a backside of the substrate. The sensing layer is configured to receive the substance.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.