Biological and chemical sensors
US8871549B2 · kind B2 · utility
26Cited by
10References
26Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2013 |
| Grant date | Oct 28, 2014 |
| Priority date | — |
| Expiry date | Feb 14, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/021
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Device structures, fabrication methods, and design structures for a biological and chemical sensor used to detect a property of a substance. The device structure includes a drain and a source of a field effect transistor formed at a frontside of a substrate. A sensing layer is formed at a backside of the substrate. The sensing layer is configured to receive the substance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.