Shuttered gate valve
US8877001B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 7, 2009 |
| Grant date | Nov 4, 2014 |
| Priority date | — |
| Expiry date | Jan 31, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/3065
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Embodiments of gate valves and methods of using same are provided herein. In some embodiments, a gate valve for use in a process chamber may include a body having an opening disposed therethrough from a first surface to an opposing second surface of the body; a pocket extending into the body from a sidewall of the opening; a gate movably disposed within the pocket between a closed position that seals the opening and an open position that reveals the opening and disposes the gate completely within the pocket; and a shutter configured to selectively seal the pocket when the gate is disposed in the open position. In some embodiments, one or more heaters may be coupled to at least one of the body or the shutter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.