MEMS-based magnetic sensor with a Lorentz force actuator used as force feedback
US8878528B2 · kind B2 · utility
10Cited by
1References
29Claims
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Key dates
| Filing date | Jun 30, 2011 |
| Grant date | Nov 4, 2014 |
| Priority date | — |
| Expiry date | Nov 18, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R33/0286
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A magnetic sensor utilizes a MEMS device that has at least one vibrating member and at least one conductive path integral with the vibrating member so that a current flows along the vibrating member and in the presence of a magnetic field interaction of the magnetic field and the point charges in the current on the conductive path due to the Lorentz force causes a change in vibration of the vibrating member. That change can be used to provide a measure of the magnetic field.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.