Method and apparatus of physical property measurement using a probe-based nano-localized light source
US8881311B2 · kind B2 · utility
6Cited by
11References
20Claims
0Family size
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Key dates
| Filing date | Mar 10, 2014 |
| Grant date | Nov 4, 2014 |
| Priority date | — |
| Expiry date | Mar 10, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/38
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method of performing physical property measurements on a sample with a probe-based metrology instrument employing a nano-confined light source is provided. In one embodiment, an SPM probe tip is configured to support an appropriate receiving element so as to provide a nano-localized light source that is able to efficiently and locally excite the sample on the nanoscale. Preferably, the separation between the tip apex and the sample during spectroscopic measurements is maintained at less than 10 nm, for example, using an AFM TR Mode control scheme.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.