Method for manufacturing a pendulous accelerometer
US8887382B2 · kind B2 · utility
1Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 5, 2008 |
| Grant date | Nov 18, 2014 |
| Priority date | — |
| Expiry date | Feb 4, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49144
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a pendulous accelerometer including a pendulous electrode formed in a substrate, at least one counter electrode, and an encapsulation cover. The at least one counter electrode is formed under the cover, and spacers are positioned between the cover and the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.