Coating compositions
US8889344B2 · kind B2 · utility
3Cited by
8References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 4, 2006 |
| Grant date | Nov 18, 2014 |
| Priority date | — |
| Expiry date | May 4, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/2041
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In one aspect, coating compositions are provided that comprise a component a component that comprises one or more silicon, antimony, aluminum, yttrium, cerium, lanthanum, tin, titanium, zirconium, hafnium, indium or zinc compounds. In another aspect, coating compositions are provided that comprise a plurality of discrete particles. Preferred coating compositions of the invention are useful for antireflective purposes, particularly with an underlaying photoresist coating layer, as well as for a barrier layer in immersion lithography.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.