Contaminate detection and substrate cleaning
US8891080B2 · kind B2 · utility
1Cited by
14References
4Claims
0Family size
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Key dates
| Filing date | Jul 7, 2011 |
| Grant date | Nov 18, 2014 |
| Priority date | — |
| Expiry date | Apr 23, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/887
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Detection of periodically repeating nanovoids is indicative of levels of substrate contamination and may aid in reduction of contaminants on substrates. Systems and methods for detecting nanovoids, in addition to, systems and methods for cleaning and/or maintaining cleanliness of substrates are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.