Active oscillation isolation system by means of a hysteresis-free pneumatic bearing
US8894052B2 · kind B2 · utility
1Cited by
8References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Aug 15, 2007 |
| Grant date | Nov 25, 2014 |
| Priority date | — |
| Expiry date | Jun 16, 2031 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/709
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Method and arrangement for oscillation isolation by means of an air bearing. The electropneumatic valves (4) for the compressed-air supply to the air bearing are subjected to a dither signal. This causes additional vibration of the mass 1 to be isolated. A compensation signal transmitter (12) ensures that additional vibration of the mass (1) is suppressed, by controlling actuators (10). Overall, hysteresis effects are avoided in the control of the compressed-air flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.