High efficiency secondary and back scattered electron detector
US8895935B2 · kind B2 · utility
4Cited by
2References
26Claims
0Family size
Assignee
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Key dates
| Filing date | Mar 12, 2012 |
| Grant date | Nov 25, 2014 |
| Priority date | — |
| Expiry date | Oct 16, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2448
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An assembly for a charged particle detection unit is described. The assembly comprises a scintillator disc, a partially coated light guide a thin metal tube for allowing the primary charged particle beam to pass through and a photomultiplier tube (PMT). The shape of scintillator disc and light guide are redesigned to improved the light signal transmission thereafter enhance the light collection efficiency. A light guide with a conicoidal surface over an embedded scintillator improved the light collection efficiency of 34% over a conventional design.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.