Patent assignee · TW · COMPANY

HERMES MICROVISION INC.

160Patents
153Active
160Granted
58Portfolio score

Filing activity: Feb 25, 2000 → Apr 29, 2019 · 57 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US8089297B2 Structure and method for determining a defect in integrated circuit manufacturing process Electricity 88 Active
US7105436B2 Method for in-line monitoring of via/contact holes etch process based on test structures in semiconductor wafer manufacturing Electricity 83 Expired
US8754372B2 Structure and method for determining a defect in integrated circuit manufacturing process Electricity 82 Active
US8421009B2 Test structure for charged particle beam inspection and method for defect determination using the same Physics 82 Active
US8299463B2 Test structure for charged particle beam inspection and method for defect determination using the same Electricity 63 Active
US8748814B1 Structure for inspecting defects in word line array fabricated by SADP process and method thereof Electricity 61 Active
US9607805B2 Apparatus of plural charged-particle beams Electricity 43 Active
US9922799B2 Apparatus of plural charged-particle beams Electricity 40 Active
US8068662B2 Method and system for determining a defect during charged particle beam inspection of a sample Physics 39 Active
US8294095B2 Apparatus of plural charged particle beams with multi-axis magnetic lens Electricity 37 Active
US6392231B1 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method Electricity 33 Expired
US10141160B2 Apparatus of plural charged-particle beams Electricity 31 Active
US10062541B2 Apparatus of plural charged-particle beams Electricity 26 Active
US10643820B2 Apparatus of plural charged-particle beams Electricity 23 Active
US7960697B2 Electron beam apparatus Electricity 19 Active
US9691588B2 Apparatus of plural charged-particle beams Electricity 19 Active
US7872236B2 Charged particle detection devices Electricity 18 Active
US9991147B2 Wafer grounding and biasing method, apparatus, and application Electricity 14 Active
US9000395B2 Energy filter for charged particle beam apparatus Electricity 14 Active
US8436317B1 Wien filter Electricity 13 Active
US7705301B2 Electron beam apparatus to collect side-view and/or plane-view image with in-lens sectional detector Electricity 13 Active
US10236156B2 Apparatus of plural charged-particle beams Electricity 12 Active
US7759653B2 Electron beam apparatus Electricity 11 Active
US8063363B2 Method and apparatus for charged particle beam inspection Electricity 11 Active
US7825386B2 System and method for a charged particle beam Electricity 10 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.