Sputtering apparatus
US8900428B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 6, 2012 |
| Grant date | Dec 2, 2014 |
| Priority date | — |
| Expiry date | Apr 30, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3482
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In one embodiment, a magnetron assembly comprises a plurality of magnets and a yoke configured to hold the plurality of magnets in at least four independent linear arrays. The plurality of magnets is arranged in the yoke so as to form a pattern comprising an outer portion and an inner portion. The outer portion substantially surrounds the perimeter of the inner portion. The magnets used to form the outer portion have a first polarity and the magnets used to form the inner portion having a second polarity. The outer portion of the pattern comprises a pair of elongated sections that are substantially parallel to one another. The outer portion of the pattern comprises a pair of turnaround sections, wherein each turnaround section substantially spans respective ends of the pair of elongated sections and wherein each turnaround section comprises a plurality of magnets having the first polarity. Other embodiments are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.