Methods for manufacturing carbon ribbons for magnetic devices
US8900883B1 · kind B1 · utility
5Cited by
2References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 22, 2012 |
| Grant date | Dec 2, 2014 |
| Priority date | — |
| Expiry date | May 7, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0262
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
In one embodiment of the invention, there is provided a method for manufacturing a magnetic memory device, comprising: depositing a carbon layer comprising amorphous carbon on a substrate; annealing the carbon layer to activate dopants contained therein; and selectively etching portions of the carbon layer to forms lines of spaced apart carbon conductors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.