Transistor with enhanced channel charge inducing material layer and threshold voltage control

US8900939B2 · kind B2 · utility

Assignee

• United States of America as represented by the Secretary of the Air Force · US

Inventors

• Francis J. Kub · Arnold, US
• Travis J. Anderson · Alexandria, US
• Karl D. Hobart · Alexandria, US
• Michael A. Mastro · Fairfax, US
• Charles R. Eddy, Jr. · Columbia, US

Key dates

• Filing date: Jan 28, 2014
• Grant date: Dec 2, 2014
• Expiry date: Jan 28, 2034

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D64/518

Abstract

High electron mobility transistors and fabrication processes are presented in which a barrier material layer of uniform thickness is provided for threshold voltage control under an enhanced channel charge inducing material layer (ECCIML) in source and drain regions with the ECCIML layer removed in the gate region.