Patent · US Active

Particle beam device having a detector arrangement

US8901510B2 · kind B2 · utility

0Cited by

6References

17Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Dietmar Dönitz · Aalen, DE
Christian Wagner · Rosenheim, DE

Key dates

Filing date	Mar 27, 2012
Grant date	Dec 2, 2014
Priority date	—
Expiry date	Mar 27, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/28
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A particle beam device has a first column with a first beam axis, the first column having a first particle beam generator and a first objective lens for focusing the first particle beam on an object. A second column with a second beam axis is provided, the second column having a second particle beam generator and a second objective lens for focusing the second particle beam on the object. A detector, having a detection axis, detects interacting particles and/or radiation. The first beam axis and the second beam axis define a first angle, different from 0° and from 180°. The first and second beam axes are situated in a first plane. The detection axis of the detector and the first beam axis are situated in a second plane. The first plane and the second plane define a second angle having an absolute value in the range of 65° to 80°.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.