Self-removal anti-stiction coating for bonding process
US8905293B2 · kind B2 · utility
12Cited by
8References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 9, 2010 |
| Grant date | Dec 9, 2014 |
| Priority date | — |
| Expiry date | Jun 13, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12986
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A bond free of an anti-stiction layer and bonding method is disclosed. An exemplary method includes forming a first bonding layer; forming an interlayer over the first bonding layer; forming an anti-stiction layer over the interlayer; and forming a liquid from the first bonding layer and interlayer, such that the anti-stiction layer floats over the first bonding layer. A second bonding layer can be bonded to the first bonding layer while the anti-stiction layer floats over the first bonding layer, such that a bond between the first and second bonding layers is free of the anti-stiction layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.