Methods for depositing metal-polymer composite materials atop a substrate
US8906454B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 10, 2012 |
| Grant date | Dec 9, 2014 |
| Priority date | — |
| Expiry date | Oct 19, 2032 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D2601/28
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Methods for depositing metal-polymer composite materials atop a substrate are provided herein. In some embodiments, a method of depositing a metal-polymer composite material atop a substrate disposed in a hot wire chemical vapor deposition (HWCVD) chamber may include flowing a current through a plurality of filaments disposed in the HWCVD chamber, the filaments comprising a metal to be deposited atop a substrate; providing a process gas comprising an initiator and a monomer to the HWCVD chamber; and depositing a metal-polymer composite material on the substrate using species decomposed from the process gas and metal atoms ejected from the plurality of filaments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.