Use of acoustic waves for purging filters in semiconductor manufacturing equipment
US8911552B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 12, 2011 |
| Grant date | Dec 16, 2014 |
| Priority date | — |
| Expiry date | Mar 18, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6715
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
An apparatus and method for qualifying a filter used to filter fluid used in a coating operation associated with photolithography or other semiconductor manufacturing processes, provides a semiconductor manufacturing tool that includes a filter and an acoustic wave generator. The filter may be housed inside a filter housing and the acoustic wave generator may produce ultrasonic, megasonic or other acoustic energy. The acoustic wave generator contacts or is in close proximity with the filter housing and provides acoustic wave energy to the filter through the housing. The acoustic wave energy causes any bubbles in the filter to become disengaged.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.