Group III-V substrate material with particular crystallographic features
US8916456B2 · kind B2 · utility
1Cited by
17References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 28, 2012 |
| Grant date | Dec 23, 2014 |
| Priority date | — |
| Expiry date | Sep 28, 2032 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/817
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A substrate including a body comprising a Group III-V material and having an upper surface, the body comprising an offcut angle defined between the upper surface and a crystallographic reference plane, and the body further having an offcut angle variation of not greater than about 0.6 degrees.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.