Apparatus and method for anchoring electrodes in MEMS devices
US8919199B2 · kind B2 · utility
11Cited by
52References
23Claims
0Family size
Assignee
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Key dates
| Filing date | Dec 1, 2011 |
| Grant date | Dec 30, 2014 |
| Priority date | — |
| Expiry date | Jul 20, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
One or more electrodes that interact with a movable mass in a MEMS device are anchored or otherwise supported from both the top and bottom and optionally also from one or more of the lateral sides other than the transduction side (i.e., the side of the electrode facing the mass) in order to severely restrict movement of the electrodes such as from interaction with the mass and/or external forces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.