Split type aerostatic bearing
US8920031B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 13, 2012 |
| Grant date | Dec 30, 2014 |
| Priority date | — |
| Expiry date | Feb 13, 2032 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16C2370/20
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A split-type aerostatic bearing for supporting a moving table to move frictionlessly on a platform (4) is disclosed. The split-type aerostatic bearing includes an aerostatic bearing plate (6), air floating elements (2′a, 2′b, 2′c, 2′d) disposed on a bottom of the aerostatic bearing plate (6) and a vacuum pre-tightening structure (7) disposed on the aerostatic bearing plate (6). The vacuum pre-tightening structure (7) is coupled to the aerostatic bearing plate (6) in a split fashion. Separation of the air floating elements (2′a, 2′b, 2′c, 2′d) from the vacuum pre-tightening structure (7) prevents the aerostatic bearing plate (6) from bending under a vacuum pre-tightening force, and hence will not affect the air floating area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.