Capacitor array and method of fabricating the same

US8921977B2 · kind B2 · utility

Assignee

• NANYA TECHNOLOGY CORPORATION · TW

Inventors

• Jen-Jui Huang · Erlun, TW
• Che-Chi Lee · Boise, US
• Shih-Shu Tsai · Pingzhen District, TW
• Cheng Chen · Greenville, US
• Shao-Ta Hsu · 溪州鄉, TW
• Chao-Wen Lay · Gongguan, TW
• Chun-I Hsieh · Daxi District, TW
• Ching-Kai Lin · Taipei, TW

Key dates

• Filing date: Dec 21, 2011
• Grant date: Dec 30, 2014
• Expiry date: Jan 24, 2032

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/716

Abstract

A capacitor array includes a plurality of capacitors and a support frame. Each capacitor includes an electrode. The support frame supports the plurality of electrodes and includes a plurality of support structures corresponding to the plurality of electrodes. Each support structure may surround the respective electrode. The support frame may include oxide of a doped oxidizable material.