Systems and methods for detecting surface charge
US8922227B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 8, 2011 |
| Grant date | Dec 30, 2014 |
| Priority date | — |
| Expiry date | Apr 5, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R29/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods are provided for detecting surface charge on a semiconductor substrate having a sensing arrangement formed thereon. An exemplary sensing system includes the semiconductor substrate having the sensing arrangement formed thereon, and a module coupled to the sensing arrangement. The module obtains a first voltage output from the sensing arrangement when a first voltage is applied to the semiconductor substrate, obtains a second voltage output from the sensing arrangement when a second voltage is applied to the semiconductor substrate, and detects electric charge on the surface of the semiconductor substrate based on a difference between the first voltage output and the second voltage output.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.