Methods and systems for utilizing design data in combination with inspection data
US8923600B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 3, 2009 |
| Grant date | Dec 30, 2014 |
| Priority date | — |
| Expiry date | Nov 3, 2030 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Various methods and systems for utilizing design data in combination with inspection data are provided. One computer-implemented method for binning defects detected on a wafer includes comparing portions of design data proximate positions of the defects in design data space. The method also includes determining if the design data in the portions is at least similar based on results of the comparing step. In addition, the method includes binning the defects in groups such that the portions of the design data proximate the positions of the defects in each of the groups are at least similar. The method further includes storing results of the binning step in a storage medium.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.