Method of manufacturing laterally coupled BAW thin films
US8925163B2 · kind B2 · utility
1Cited by
14References
16Claims
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Key dates
| Filing date | Oct 13, 2011 |
| Grant date | Jan 6, 2015 |
| Priority date | — |
| Expiry date | Dec 20, 2031 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49155
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
The invention describes a manufacturing method for an acoustic balanced-unbalanced (balun) or balanced-balanced thin-film BAW filter based on lateral acoustic coupling. In laterally acoustically coupled thin-film BAW filters (LBAW) one can realize transformation from unbalanced to balanced electric signal if the electrodes of the balanced port are placed on the opposite sides of the piezoelectric film. The manufacturing process is simpler than in the corresponding component based on vertical acoustical coupling. The device can also realize impedance transformation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.