Charged corpuscular ray apparatus
US8928485B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 15, 2009 |
| Grant date | Jan 6, 2015 |
| Priority date | — |
| Expiry date | Jun 8, 2030 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/31749
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present invention relates to the acquisition of tilted series images of a minute sample in a short time.The present invention relates to: measuring in advance the relation between an amount of focus shift and a degree of coincidence at the time of acquiring tilted series images; calculating backwards a focus shift from the degree of coincidence on the basis of this relation; correcting the focus shift by controlling a stage, an objective lens, and the like; and thus acquiring the tilted series images. In addition, the present invention relates to: acquiring a reference image in advance at the time of photographing the tilted series images; obtaining the correlation between an acquired image and the reference image; and performing, if the degree of coincidence is equal to or smaller than a set value, processing such as the transmission of a warning message and the stop of an image acquisition sequence. According to the present invention, it becomes possible to perform focusing at the time of photographing the tilted series images at high speed, so that the length of time for photographing the tilted series images can be shortened. In addition, an image inappropriate for three-di…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.