MEMS sensor with movable Z-axis sensing element
US8939029B2 · kind B2 · utility
7Cited by
8References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 2, 2012 |
| Grant date | Jan 27, 2015 |
| Priority date | — |
| Expiry date | May 1, 2033 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0871
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS sensor includes a substrate and a MEMS structure coupled to the substrate. The MEMS structure has a mass movable with respect to the substrate. The MEMS sensor also includes a reference structure electrically coupled to the mass of the MEMS sensor. The reference structure is used to provide a reference to offset any environmental changes that may affect the MEMS sensor in order to increase the accuracy of its measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.