Floating high vacuum seal cartridge
US8939451B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 11, 2013 |
| Grant date | Jan 27, 2015 |
| Priority date | — |
| Expiry date | Aug 8, 2033 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16J15/443
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An apparatus that uses a combination of mechanical contact bearings and air bearings is disclosed. The apparatus includes a fixed seal housing, attached to a process chamber and a floating seal cartridge, which is disposed in proximity to the fixed seal housing. A shaft is disposed with an aperture in the process chamber, the central opening in the fixed seal housing and the second central opening in the floating seal cartridge. A first air bearing is created between the shaft and the floating seal cartridge in the second central opening. A second air bearing is created between the floating seal cartridge and the fixed seal housing. In this way, the floating seal cartridge is free to move with the shaft radially, while still maintaining a seal between the process chamber and the external environment.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.