Elaina Babayan
6Patents
0h-index
5Co-inventors
34Inventor score
Filing activity: Mar 11, 2013 → Jun 9, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11718912B2 | Methods and apparatus for calibrating concentration sensors for precursor delivery | Physics | 0 | Active |
| US10822699B2 | Techniques for controlling precursors in chemical deposition processes | Electricity | 0 | Active |
| US11668007B2 | Methods and apparatus for calibrating concentration sensors for precursor delivery | General | 0 | Revoked |
| US8939451B2 | Floating high vacuum seal cartridge | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11718914B2 | Techniques for controlling precursors in chemical deposition processes | Electricity | 0 | Active |
| US12104253B2 | Techniques for controlling precursors in chemical deposition processes | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.