Process for obtaining an array of nanodots
US8940623B2 · kind B2 · utility
4Cited by
1References
20Claims
0Family size
Assignees
Inventors
Key dates
| Filing date | Feb 10, 2012 |
| Grant date | Jan 27, 2015 |
| Priority date | — |
| Expiry date | Feb 23, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D30/6893
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A process for obtaining an array of nanodots (212) for microelectronic devices, characterized in that it comprises the following steps:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.