Patent · US Active

Process for obtaining an array of nanodots

US8940623B2 · kind B2 · utility

4Cited by
1References
20Claims
0Family size

Assignees

Inventors

Key dates

Filing dateFeb 10, 2012
Grant dateJan 27, 2015
Priority date
Expiry dateFeb 23, 2033

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D30/6893
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A process for obtaining an array of nanodots (212) for microelectronic devices, characterized in that it comprises the following steps:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.