Patent · US Active

Semiconductor device

US8941152B1 · kind B1 · utility

8Cited by
0References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 13, 2013
Grant dateJan 27, 2015
Priority date
Expiry dateDec 13, 2033

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2224/11
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A method of forming a semiconductor device comprises forming a base wafer comprising a first chip package portion, a second chip package portion, and a third chip package portion. The method also comprises forming a capping wafer comprising a plurality of isolation trenches, each of the plurality of isolation trenches being configured to substantially align with one of the first chip package portion, the second chip package portion or the third chip package portion. The method further comprises eutectic bonding the capping wafer and the base wafer to form a wafer package. The method additionally comprises dicing the wafer package into a first chip package, a second chip package, and a third chip package. The method also comprises placing the first chip package, the second chip package, and the third chip package onto a substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.