Surface (lateral) voltage-sustaining region with an insulator film containing conductive particles

US8941207B2 · kind B2 · utility

Assignee

• University of Electronic Science and Technology of China · CN

Inventor

• Xingbi Chen · Chengdu, CN

Key dates

• Filing date: Jan 11, 2013
• Grant date: Jan 27, 2015
• Expiry date: Feb 15, 2033

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D64/111

Abstract

A method or an auxiliary method to implement Optimum Variation Lateral Electric Displacement uses an insulator film(s) containing conductive particles covering on the semiconductor surface. This film(s) is capable of transmitting electric displacement into or extracting it from the semiconductor surface, or even capable of extracting some electric displacement from a part of the semiconductor surface and then transmitting it to another part of the surface. Optimum Variation Lateral Electric Displacement can be used to fabricate lateral high voltage devices, or as the edge termination for vertical high voltage devices, or to make capacitance. It can be further used to prevent strong field at the boundaries of semiconductor regions of different types of conductivity types.