Particle beam device and method for analyzing and/or treating an object
US8946650B2 · kind B2 · utility
0Cited by
9References
26Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 22, 2011 |
| Grant date | Feb 3, 2015 |
| Priority date | — |
| Expiry date | Sep 22, 2031 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2802
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A particle beam device and a method for analyzing and/or treating an object is disclosed. According to the described system, the position of a crossover on an optical axis of a particle beam device can be freely adjusted, even in the case of a fixed extractor potential and a fixed high voltage. The particle beam device has a first electrode unit with three electrode apparatuses, a second electrode unit with three electrode apparatuses, and an acceleration unit. The method according to the system described herein uses the particle beam device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.