Liquid processing apparatus, liquid processing method, and storage medium
US8950414B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 16, 2010 |
| Grant date | Feb 10, 2015 |
| Priority date | — |
| Expiry date | Jul 16, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The liquid processing apparatus includes: a liquid supply mechanism; a supply line connected to the liquid supply mechanism, the supply line having a discharge opening for discharging a temperature-regulated liquid; a processing unit supporting the discharge opening of the supply line; a return line configured to return the liquid supplied to the supply line to the liquid supply mechanism; and a liquid-supply switching valve configured to switch between supply of the liquid, which is used in a processing of an object to be processed in the processing unit, and stoppage of the liquid supply. The liquid-supply switching valve is disposed on the supply line on a route of the liquid returning from the supply line to the liquid supply mechanism through the return line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.