MEMS structure preventing stiction
US8952463B2 · kind B2 · utility
1Cited by
6References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 24, 2010 |
| Grant date | Feb 10, 2015 |
| Priority date | — |
| Expiry date | Aug 17, 2031 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B7/0048
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A MEMS (Micro-Electro-Mechanical-System) structure preventing stiction, comprising: a substrate; and at least two structural layers above the substrate, wherein at least one of the at least two structural layers is a movable part, and anyone or more of the at least two structural layers is provided with at least one bump to prevent the movable part from sticking to another portion of the MEMS structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.