Motion sensor device and methods for forming the same
US8960003B2 · kind B2 · utility
1Cited by
8References
12Claims
0Family size
Assignee
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Key dates
| Filing date | Jan 18, 2012 |
| Grant date | Feb 24, 2015 |
| Priority date | — |
| Expiry date | Nov 23, 2032 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/43
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Micro-Electro-Mechanical System (MEMS) device includes a sensing element, and a proof mass over and overlapping at least a portion of the sensing element. The proof mass is configured to be movable toward the sensing element. A protection region is formed between the sensing element and the proof mass. The protection region overlaps a first portion of the sensing element, and does not overlap a second portion of the sensing element, wherein the first and the second portions overlap the proof mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.