Patent · US Active

Ion beam source

US8968535B2 · kind B2 · utility

0Cited by

4References

8Claims

0Family size

Assignee

SPP Process Technology Systems UK Limited · GB

Inventors

John MacNeil · Valrico, US
Paul Bennett · Bristol, GB

Key dates

Filing date	Dec 14, 2010
Grant date	Mar 3, 2015
Priority date	—
Expiry date	Sep 28, 2031

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/304
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

This invention relates an ion beam source (10) for use with a non-electrical conducting target (14) including a grid (13) for extracting ions and a power supply for supplying pass power to the grid (13) to extract the ions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.