MEMS proof mass with split z-axis portions
US8978475B2 · kind B2 · utility
31Cited by
68References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 1, 2012 |
| Grant date | Mar 17, 2015 |
| Priority date | — |
| Expiry date | Sep 24, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0848
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
This document discusses among other things apparatus and methods for a proof mass including split z-axis portions. An example proof mass can include a center portion configured to anchor the proof-mass to an adjacent layer, a first z-axis portion configure to rotate about a first axis using a first hinge, the first axis parallel to an x-y plane orthogonal to a z-axis, a second z-axis portion configure to rotate about a second axis using a second hinge, the second axis parallel to the x-y plane, wherein the first z-axis portion is configured to rotate independent of the second z-axis portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.