Treatment liquid for inhibiting pattern collapse in microstructures, and microstructure manufacturing method using said treatment liquid
US8980812B2 · kind B2 · utility
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Key dates
| Filing date | Jul 14, 2011 |
| Grant date | Mar 17, 2015 |
| Priority date | — |
| Expiry date | Nov 19, 2031 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC11D7/3281
- WIPO fieldBasic materials chemistry
- WIPO sectorChemistry
Abstract
There are provided a processing liquid for suppressing pattern collapse of a microstructure which includes at least one compound selected from the group consisting of an imidazolium halide containing an alkyl group having 12, 14 or 16 carbon atoms, a pyridinium halide containing an alkyl group having 14 or 16 carbon atoms and an ammonium halide containing an alkyl group having 16 or 18 carbon atoms, and water; and a method for producing a microstructure formed of silicon oxide using the processing liquid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.