Inventor · Tokyo, JP

Masaru Ohto

10Patents
3h-index
13Co-inventors
57Inventor score

Filing activity: Dec 24, 1990 → Nov 29, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US5185185A Process of pretreatment of metal-plating resin molded articles Electricity 6 Expired
US7572758B2 Cleaning liquid and cleaning method Chemistry; Metallurgy 6 Active
US9422512B2 Cleaning liquid for semiconductor elements and cleaning method using same Electricity 3 Active
US7977292B2 Cleaning composition and process for producing semiconductor device Chemistry; Metallurgy 3 Active
US9196472B2 Processing liquid for suppressing pattern collapse of fine metal structure, and method for producing fine metal structure using same Performing Operations; Transporting 2 Active
US6475373B1 Method of controlling NOx gas emission by hydrogen peroxide Chemistry; Metallurgy 1 Expired
US9587208B2 Cleaning liquid composition, method for cleaning semiconductor element, and method for manufacturing semiconductor element Chemistry; Metallurgy 1 Active
US8658053B2 Etching composition for metal material and method for manufacturing semiconductor device by using same Electricity 0 Active
US9334161B2 Processing liquid for suppressing pattern collapse of fine metal structure and method for producing fine metal structure using same Electricity 0 Active
US8980812B2 Treatment liquid for inhibiting pattern collapse in microstructures, and microstructure manufacturing method using said treatment liquid Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.