Patent · US Active

Cooling of actuator coils

US8982317B2 · kind B2 · utility

1Cited by

4References

5Claims

0Family size

Assignee

ASML Holding N.V. · NL

Inventors

Roberto B. Wiener · Bethel, US
Pradeep K. Govil · Norwalk, US
Michael Emerson Brown · Ridgefield, US

Key dates

Filing date	Jul 31, 2009
Grant date	Mar 17, 2015
Priority date	—
Expiry date	Aug 11, 2032

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70758
WIPO fieldOptics
WIPO sectorInstruments

Abstract

In order to effectively transfer heat from inner layers of an actuator coil to an area external to the coil, heat transfer elements, located proximate to the actuator coil, can be used. In an embodiment, a heat transfer apparatus for the actuator coil can include one or more heat transfer elements located proximate to one or more layers or one or more windings of the actuator coil and a cooling surface located proximate to the one or more heat transfer elements and to the actuator coil. In this configuration, the heat transfer apparatus can transfer heat from inner layers of the actuator coil to the cooling surface, which in turn transfers the heat to an area external to the actuator coil.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.