Method and system for creation of binary spatial filters
US8984453B2 · kind B2 · utility
2Cited by
13References
31Claims
0Family size
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Key dates
| Filing date | Jun 28, 2012 |
| Grant date | Mar 17, 2015 |
| Priority date | — |
| Expiry date | Nov 28, 2032 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/068
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and systems for designing a binary spatial filter based on data indicative of a desired exposure condition to be emulated by an inspection system, and for implementing the binary spatial filter in an optical path of the inspection system, thereby enabling emulation of the desired exposure condition by interacting a light beam of the inspection system with the binary spatial filter. The present method and systems enable on-the-fly and on-demand design and implementation/generation of spatial filters for use in inspection systems.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.