Methods to prevent filler entrapment in microelectronic device to microelectronic substrate interconnection structures
US8999765B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 25, 2013 |
| Grant date | Apr 7, 2015 |
| Priority date | — |
| Expiry date | Jun 25, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Embodiments of the present description include methods for attaching a microelectronic device to a microelectronic substrate with interconnection structures after disposing of an underfill material on the microelectronic device, wherein filler particles within the underfill material may be repelled away from the interconnection structures prior to connecting the microelectronic device to the microelectronic structure. These methods may include inducing a charge on the interconnection structures and may include placing the interconnection structures between opposing plates and producing a bias between the opposing plates after depositing the underfill material on the interconnection structures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.