Suspended membrane device
US9000542B2 · kind B2 · utility
5Cited by
11References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 31, 2013 |
| Grant date | Apr 7, 2015 |
| Priority date | — |
| Expiry date | May 31, 2033 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2203/0127
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present disclosure is directed to a device that includes a substrate and a sensor formed on the substrate. The sensor includes a chamber formed from a plurality of integrated cavities, a membrane above the substrate, the membrane having a plurality of openings, each opening positioned above one of the cavities, and a plurality of diamond shaped anchors positioned between the membrane and the substrate, the anchors positioned between each of the cavities. A center of each opening is also a center of one of the cavities.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.