Compensation of changes in MEMS capacitive transduction
US9000833B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 6, 2013 |
| Grant date | Apr 7, 2015 |
| Priority date | — |
| Expiry date | Mar 6, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2009/02519
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A method for compensating for strain on a MEMS device includes generating a signal indicative of a strain on the MEMS device in a first mode of operating a system including the MEMS device. The method includes compensating for the strain in a second mode of operating the system based on the signal. Generating the signal may include comparing an indicator of a resonant frequency of the MEMS device to a predetermined resonant frequency of the MEMS device. Generating the signal may include comparing a first output of a strain-sensitive device to a second output of a strain-insensitive device and generating an indicator thereof. Generating the signal may include sensing a first capacitive transduction of strain-sensitive electrodes of the MEMS device in the first mode and generating the signal based thereon. The strain-sensitive electrodes of the MEMS device may be disabled in the second mode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.