Patent · US Active

Electromechanical device with optical function separated from mechanical and electrical function

US9001412B2 · kind B2 · utility

4Cited by

559References

42Claims

0Family size

Assignee

QUALCOMM MEMS Technologies, Inc. · US

Inventors

Clarence Chui · San Jose, US
William J. Cummings · Millbrae, US
Brian J. Gally · Los Gatos, US
Lior Kogut · Haifa, IL
Ming-Hau Tung · San Francisco, US
Yeh-Jiun Tung · Princeton, US
Chih-Wei Chiang · Baoshan, TW
Denis Endisch · Cupertino, US

Key dates

Filing date	Oct 10, 2012
Grant date	Apr 7, 2015
Priority date	—
Expiry date	Oct 10, 2032

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/42
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.