Patent · US Active

EUV collector with cooling device

US9007559B2 · kind B2 · utility

1Cited by

5References

13Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Michael Layh · Altusried, DE
Udo Dinger · Oberkochen, DE

Key dates

Filing date	Aug 22, 2011
Grant date	Apr 14, 2015
Priority date	—
Expiry date	Nov 18, 2033

Classification

Technology area (CPC G)Physics
CPC primaryG21K2201/067
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An EUV collector for collecting and transmitting radiation from an EUV radiation source includes at least one collector mirror for reflecting an emission of the EUV radiation source, which is rotationally symmetric with respect to a central axis. The EUV collector also includes a cooling device for cooling the at least one collector mirror. The cooling device has at least one cooling element, which has a course with respect to the collector mirror, in each case, such that the projection of the course into a plane perpendicular to the central axis has a main direction, which encloses an angle of at most 20° with respect to a predetermined preferred direction. The collector transmits improved quality radiation to illuminate an object field.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.