Recessed contact to semiconductor nanowires
US9012883B2 · kind B2 · utility
1Cited by
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11Claims
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Key dates
| Filing date | Dec 21, 2012 |
| Grant date | Apr 21, 2015 |
| Priority date | — |
| Expiry date | Apr 12, 2033 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/932
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor nanowire device includes at least one semiconductor nanowire having a bottom surface and a top surface, an insulating material which surrounds the semiconductor nanowire, and an electrode ohmically contacting the top surface of the semiconductor nanowire. A contact of the electrode to the semiconductor material of the semiconductor nanowire is dominated by the contact to the top surface of the semiconductor nanowire.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.