Patent · US Active

Recessed contact to semiconductor nanowires

US9012883B2 · kind B2 · utility

1Cited by
0References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 21, 2012
Grant dateApr 21, 2015
Priority date
Expiry dateApr 12, 2033

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/932
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor nanowire device includes at least one semiconductor nanowire having a bottom surface and a top surface, an insulating material which surrounds the semiconductor nanowire, and an electrode ohmically contacting the top surface of the semiconductor nanowire. A contact of the electrode to the semiconductor material of the semiconductor nanowire is dominated by the contact to the top surface of the semiconductor nanowire.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.