Patent · US Active

Coupling transfer system

US9016501B2 · kind B2 · utility

3Cited by

8References

9Claims

0Family size

Assignee

National Institute of Advanced Industrial Science and Technology · JP

Inventors

Shiro Hara · Ushiku, JP
Hitoshi Maekawa · Yokohama, JP

Key dates

Filing date	May 30, 2011
Grant date	Apr 28, 2015
Priority date	—
Expiry date	May 30, 2031

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB65D2313/04
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

In a transfer system for wafers, etc., a coupling chamber corresponding to a port is formed only when a transfer box comes in tight contact with an apparatus as a transfer target in the transfer box is transferred into the apparatus, so that the transfer target will be transferred together with the coupling chamber into the apparatus by means of magnetic attraction forces exerted between the transfer box, transfer box door and apparatus door, thereby simplifying the structures of the transfer box and apparatus and also allowing the transfer target to be transferred into the apparatus without fail.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.